Gallium oxide and its solid solutions with In2O3 and Al2O3 have recently attracted considerable interest as a promising material system for applications such as high power devices and solar blind UV photo detectors. Epitaxial growth of structurally perfect crystalline layers with defined doping is a prerequisite for exploiting their potential for device applications. The deposition of homoepitaxial Ga2O3 layers will be performed by using metal-organic vapor phase epitaxy (MOVPE). An essential requirement is the drastic reduction of the density of point and planar defects. At the same time, the effect of the latter on the electrical properties of the layers, such as conductivity and carrier mobility, has to be further investigated. The preparation of substrate surfaces with specific orientations and without any surface damage also plays an important role in the growth of high quality epitaxial layers and needs additional development.
The focus is on the study of the effects of the growth parameters and the nature of the donors on the electrical properties of the layers. Another point of interest is focused on the growth of β-Ga2O3 homoepitaxial layers on different oriented substrates and on substrates with optimized off-orientations in  direction and the investigation of their influence on the generation of planar- and point defects in the layers.
Major accomplishments expected:
Collaboration with partners in the project:
Michele Baldini is from Parma, Italy, where he received his PhD degree in Innovative Material Science in 2011. He has been working on the growth of Ga2O3 layers by MOVPE at Leibniz Institute for Crystal Growth (IKZ) in Berlin, Germany, since September 2012.
If you have queries about the project, please contact the PI:
Günter Wagner, Institut für Kristallzüchtung
Leibniz-Insitut im Forschungsverbund Berlin e.V.
10117 Berlin, Germany
The Leibniz ScienceCampus GraFOx is a network of two Leibniz institutes, two universities and one institute of the Max Planck Society. The Network is based in Berlin, Germany.